Ex situn and p doping of vertical epitaxial short silicon nanowires by ion implantation

Published 2009 View Full Article

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Title
Ex situn and p doping of vertical epitaxial short silicon nanowires by ion implantation
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 20, Issue 16, Pages 165706
Publisher
IOP Publishing
Online
2009-04-02
DOI
10.1088/0957-4484/20/16/165706

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