Shrinking solid-state nanopores using electron-beam-induced deposition

Published 2009 View Full Article

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Title
Shrinking solid-state nanopores using electron-beam-induced deposition
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 20, Issue 11, Pages 115302
Publisher
IOP Publishing
Online
2009-02-25
DOI
10.1088/0957-4484/20/11/115302

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