Photoluminescence from intermediate phase silicon structure and nanocrystalline silicon in plasma enhanced chemical vapor deposition grown Si/SiO2multilayers

Title
Photoluminescence from intermediate phase silicon structure and nanocrystalline silicon in plasma enhanced chemical vapor deposition grown Si/SiO2multilayers
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 19, Issue 32, Pages 325708
Publisher
IOP Publishing
Online
2008-07-05
DOI
10.1088/0957-4484/19/32/325708

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