Ion beam shaping and downsizing of nanostructures

Published 2008 View Full Article

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Title
Ion beam shaping and downsizing of nanostructures
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 19, Issue 5, Pages 055301
Publisher
IOP Publishing
Online
2008-01-15
DOI
10.1088/0957-4484/19/05/055301

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