Single-step electrochemical nanolithography of metal thin films by localized etching with an AFM tip

Published 2008 View Full Article

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Title
Single-step electrochemical nanolithography of metal thin films by localized etching with an AFM tip
Authors
Keywords
-
Journal
NANOTECHNOLOGY
Volume 19, Issue 32, Pages 325301
Publisher
IOP Publishing
Online
2008-07-03
DOI
10.1088/0957-4484/19/32/325301

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