Berkovich Nanoindentation on AlN Thin Films

Published 2010 View Full Article

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Title
Berkovich Nanoindentation on AlN Thin Films
Authors
Keywords
-
Journal
Nanoscale Research Letters
Volume 5, Issue 6, Pages 935-940
Publisher
Springer Nature
Online
2010-03-30
DOI
10.1007/s11671-010-9582-5

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