Journal
NANOSCALE RESEARCH LETTERS
Volume 5, Issue 2, Pages 353-359Publisher
SPRINGEROPEN
DOI: 10.1007/s11671-009-9487-3
Keywords
ZnO nanorod array; Chemical sensor; MOCVD
Funding
- Korean Government (MOEHRD, Basic Research Promotion Fund) [KRF-2008-521D00177]
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We report a novel method for fabricating a highly sensitive chemical sensor based on a ZnO nanorod array that is epitaxially grown on a Pt-coated Si substrate, with a top-top electrode configuration. To practically test the device, its O-2 and NO2 sensing properties were investigated. The gas sensing properties of this type of device suggest that the approach is promising for the fabrication of sensitive and reliable nanorod chemical sensors.
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