Highly sensitive surface acoustic wave (SAW) humidity sensors based on sol–gel SiO2 films: Investigations on the sensing property and mechanism

Published 2015 View Full Article

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Title
Highly sensitive surface acoustic wave (SAW) humidity sensors based on sol–gel SiO2 films: Investigations on the sensing property and mechanism
Authors
Keywords
SAW sensor, Humidity, SiO, 2, Mass loading, Electric loading
Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 215, Issue -, Pages 283-291
Publisher
Elsevier BV
Online
2015-04-09
DOI
10.1016/j.snb.2015.03.069

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