Vertical nanostructure arrays by plasma etching for applications in biology, energy, and electronics

Published 2013 View Full Article

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Title
Vertical nanostructure arrays by plasma etching for applications in biology, energy, and electronics
Authors
Keywords
-
Journal
Nano Today
Volume 8, Issue 3, Pages 265-289
Publisher
Elsevier BV
Online
2013-06-04
DOI
10.1016/j.nantod.2013.04.008

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