Resorcinol–formaldehyde aerogels for CMOS-MEMS capacitive humidity sensor

Published 2015 View Full Article

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Title
Resorcinol–formaldehyde aerogels for CMOS-MEMS capacitive humidity sensor
Authors
Keywords
CMOS-MEMS, Humidity sensor, Resorcinol–formaldehyde aerogels
Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 214, Issue -, Pages 181-188
Publisher
Elsevier BV
Online
2015-04-04
DOI
10.1016/j.snb.2015.03.024

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