Highly sensitive amorphous In–Ga–Zn–O films for ppb-level ozone sensing: Effects of deposition temperature

Title
Highly sensitive amorphous In–Ga–Zn–O films for ppb-level ozone sensing: Effects of deposition temperature
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 211, Issue -, Pages 354-358
Publisher
Elsevier BV
Online
2015-02-04
DOI
10.1016/j.snb.2015.01.048

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