Metal-Catalyzed Electroless Etching of Silicon in Aerated HF/H2O Vapor for Facile Fabrication of Silicon Nanostructures

Published 2014 View Full Article

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Title
Metal-Catalyzed Electroless Etching of Silicon in Aerated HF/H2O Vapor for Facile Fabrication of Silicon Nanostructures
Authors
Keywords
-
Journal
NANO LETTERS
Volume 14, Issue 8, Pages 4212-4219
Publisher
American Chemical Society (ACS)
Online
2014-07-19
DOI
10.1021/nl500361u

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