Effective Nanometer Airgap of NEMS Devices Using Negative Capacitance of Ferroelectric Materials

Published 2014 View Full Article

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Title
Effective Nanometer Airgap of NEMS Devices Using Negative Capacitance of Ferroelectric Materials
Authors
Keywords
-
Journal
NANO LETTERS
Volume 14, Issue 6, Pages 3160-3165
Publisher
American Chemical Society (ACS)
Online
2014-05-06
DOI
10.1021/nl5004416

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