Detecting 20 nm Wide Defects in Large Area Nanopatterns Using Optical Interferometric Microscopy

Title
Detecting 20 nm Wide Defects in Large Area Nanopatterns Using Optical Interferometric Microscopy
Authors
Keywords
-
Journal
NANO LETTERS
Volume 13, Issue 8, Pages 3716-3721
Publisher
American Chemical Society (ACS)
Online
2013-07-31
DOI
10.1021/nl401622b

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