Direct Imaging of 3D Atomic-Scale Dopant-Defect Clustering Processes in Ion-Implanted Silicon

Published 2013 View Full Article

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Title
Direct Imaging of 3D Atomic-Scale Dopant-Defect Clustering Processes in Ion-Implanted Silicon
Authors
Keywords
-
Journal
NANO LETTERS
Volume 13, Issue 6, Pages 2458-2462
Publisher
American Chemical Society (ACS)
Online
2013-05-16
DOI
10.1021/nl400447d

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