Bringing Order to the World of Nanowire Devices by Phase Shift Lithography

Published 2010 View Full Article

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Title
Bringing Order to the World of Nanowire Devices by Phase Shift Lithography
Authors
Keywords
-
Journal
NANO LETTERS
Volume 11, Issue 9, Pages 3513-3518
Publisher
American Chemical Society (ACS)
Online
2010-11-16
DOI
10.1021/nl102103w

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