“Force-Feedback” Leveling of Massively Parallel Arrays in Polymer Pen Lithography

Title
“Force-Feedback” Leveling of Massively Parallel Arrays in Polymer Pen Lithography
Authors
Keywords
-
Journal
NANO LETTERS
Volume 10, Issue 4, Pages 1335-1340
Publisher
American Chemical Society (ACS)
Online
2010-02-25
DOI
10.1021/nl904200t

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