Vacuum-Free Self-Powered Parallel Electron Lithography with Sub-35-nm Resolution

Published 2010 View Full Article

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Title
Vacuum-Free Self-Powered Parallel Electron Lithography with Sub-35-nm Resolution
Authors
Keywords
-
Journal
NANO LETTERS
Volume 10, Issue 6, Pages 2197-2201
Publisher
American Chemical Society (ACS)
Online
2010-05-19
DOI
10.1021/nl101055h

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