Wafer-Scale, Sub-5 nm Junction Formation by Monolayer Doping and Conventional Spike Annealing

Published 2009 View Full Article

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Title
Wafer-Scale, Sub-5 nm Junction Formation by Monolayer Doping and Conventional Spike Annealing
Authors
Keywords
-
Journal
NANO LETTERS
Volume 9, Issue 2, Pages 725-730
Publisher
American Chemical Society (ACS)
Online
2009-01-23
DOI
10.1021/nl8032526

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