Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 236, Issue -, Pages 273-280Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2015.08.001
Keywords
Microcrystalline silicon; Strain gauge arrays; High spatial resolution arrays; Flexible substrate
Funding
- ODAXOS SA
- French National Association for Research and Technology (ANRT) [2012/0307]
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This paper presents strain sensor arrays on flexible substrates able to measure local deformation induced by radii of curvature of few millimeters. Sensors use n-type doped microcrystalline silicon (pc-Si) as piezoresistive material, directly deposited on polyimide sheets at 165 degrees C. Sensitivity of individual sensors was investigated under tensile and compressive bending at various radii of curvature, down to 5 mm. A Transmission Line Method was used to extract the resistivity for each radius. The devices exhibited longitudinal gauge factors of-31 and longitudinal piezoresistive coefficients of -4.10(-10) Pa-1. Reliability was demonstrated with almost unchanged resistances after cycles of bending (standard deviation of 1.7%). Strain gauge arrays, composed of 800 resistors on a 2 cm(2) area, were fabricated with a spatial resolution of 500 x 500 mu m(2). Strain mapping showed the possibility to detect local deformation on a single resistor or to detect larger objects. These strain sensor arrays can find applications when high sensitivity and high spatial resolution is required. This paper also showed that mu c-Si can be a relevant semi-conductor candidate for flexible electronics. (C) 2015 Elsevier B.V. All rights reserved.
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