Conductance sensing for monitoring micromechanical machining of conductive materials

Published 2015 View Full Article

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Title
Conductance sensing for monitoring micromechanical machining of conductive materials
Authors
Keywords
Micromachining process, Tool-piece contact resistance, Conductance sensor design, High precision system
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 232, Issue -, Pages 163-171
Publisher
Elsevier BV
Online
2015-06-05
DOI
10.1016/j.sna.2015.05.015

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