A planar micro thermoelectric generator with high thermal resistance

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Title
A planar micro thermoelectric generator with high thermal resistance
Authors
Keywords
Micro thermoelectric generator, Thermal resistance, Efficiency factor, Polysilicon, Figure of merit, Micromachining
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 221, Issue -, Pages 67-76
Publisher
Elsevier BV
Online
2014-11-04
DOI
10.1016/j.sna.2014.10.026

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