Article
Chemistry, Multidisciplinary
Bo Xu, Jiankai Zhu, Fei Xiao, Na Liu, Yachun Liang, Chenyin Jiao, Jing Li, Qingyang Deng, Song Wu, Ting Wen, Shenghai Pei, Hujie Wan, Xu Xiao, Juan Xia, Zenghui Wang
Summary: MXene is an emerging two-dimensional nanomaterial with good electrical conductivity and high elastic modulus, which can be used to fabricate nanoelectromechanical resonators and vacuum gauges.
Article
Chemistry, Analytical
Brittany Carter, Uriel F. Hernandez, David J. Miller, Andrew Blaikie, Viva R. Horowitz, Benjamin J. Aleman
Summary: This study demonstrates a scalable platform of suspended graphene resonators, showing persistent mechanical coupling between neighboring resonators and evidence of inter-resonator coupling of higher-order modes. This establishes the platform as a viable option for realizing large-scale programmable networks and enabling various applications.
Article
Engineering, Electrical & Electronic
Jiawei Fang, Pengcheng Zhang, Rui Yang, Zenghui Wang
Summary: This study presents a highly reconfigurable logic device based on NEMS resonator, which uses a single resonator with multiple inputs to perform different logic operations by changing the input combination. Both DC and AC voltages are used as input sources to enhance reconfigurability and On/Off ratio.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
(2021)
Article
Multidisciplinary Sciences
Utku Emre Ali, Gaurav Modi, Ritesh Agarwal, Harish Bhaskaran
Summary: Phase-change materials have the ability to permanently and reversibly switch between amorphous and crystalline states. In this study, nanowires were used as active nanoelectromechanical systems to overcome limitations in suspended thin-film configurations. By exploiting a dislocation-based route for amorphization, the researchers achieved active modulation of Young's modulus in GeTe nanowires. These nanowires enabled power-free tuning of resonance frequency and demonstrated real-time frequency tuning in a frequency-hopping spread spectrum radio prototype.
NATURE COMMUNICATIONS
(2022)
Article
Materials Science, Multidisciplinary
Jan N. Kirchhof, Yuefeng Yu, Denis Yagodkin, Nele Stetzuhn, Daniel B. de Araujo, Kostas Kanellopulos, Samuel Manas-Valero, Eugenio Coronado, Herre van der Zant, Stephanie Reich, Silvan Schmid, Kirill Bolotin
Summary: Nanomechanical spectroscopy (NMS) is a new approach to determine optical absorption spectra of nanoscale materials via mechanical measurements. It directly measures absorption by measuring changes in the resonance frequency of a membrane resonator. In this study, a protocol for NMS of 2D materials is developed, which improves sensitivity and simplifies the experiment. The use of low-stress silicon nitride membranes as the substrate reduces noise-equivalent power.
Article
Chemistry, Multidisciplinary
Jiankai Zhu, Bo Xu, Fei Xiao, Yachun Liang, Chenyin Jiao, Jing Li, Qingyang Deng, Song Wu, Ting Wen, Shenghai Pei, Juan Xia, Zenghui Wang
Summary: This study elucidates the frequency scaling law for WSe2 nanomechanical resonators and demonstrates a broad frequency tuning range and high tuning efficiency. These findings can provide important guidelines for designing high-frequency WSe2 resonant devices.
Article
Chemistry, Analytical
Wioletta Trzpil, Julien Charensol, Diba Ayache, Nicolas Maurin, Roman Rousseau, Aurore Vicet, Michael Bahriz
Summary: This paper presents the design of a gas sensor based on photoacoustic spectroscopy, using a silicon micromechanical resonator with capacitive transduction. By spatially separating the photoacoustic excitation and capacitive transduction functions, this sensor overcomes the limitations caused by opposite physical trends. The sensitivity of the sensor is increased compared to traditional on-beam gas sensing techniques.
SENSORS AND ACTUATORS B-CHEMICAL
(2022)
Article
Engineering, Mechanical
Hossein Darban
Summary: The study investigates the size-dependent free transverse vibration of micro- and nanocantilever mass sensors. The analysis considers a general case of a sensor with arbitrary attached particles. By dividing the domain into segments at the locations of the particles and describing the displacement fields based on the Bernoulli-Euler beam theory, the size effect is incorporated by assuming the constitutive equation of the stress-driven nonlocal theory of elasticity. The eigenvalue problem is generated by solving the equation of motion in each sensor segment and imposing variationally consistent and higher-order constitutive boundary and continuity conditions. Analytical analysis is performed to examine the natural frequencies and their sensitivity to the attachment of a small mass. Numerical simulations are conducted to investigate the effect of size dependency on the frequency shifts of the first four vibration modes when the sensors are loaded with one to three particles. It is revealed that neglecting the size effect may lead to incorrect mass detections of the attached particles.
MECHANICAL SYSTEMS AND SIGNAL PROCESSING
(2023)
Article
Physics, Applied
Zichao Li, Minxing Xu, Richard A. Norte, Alejandro M. Aragon, Fred van Keulen, Farbod Alijani, Peter G. Steeneken
Summary: We use torsion beam supports to tune the Q-factor of Si 3 N 4 string resonators, achieving a 50% enhancement compared to standard clamped-clamped resonators through design optimization. Our study reveals the dissipation limits and provides insights into advanced designs for reaching the ultimate f0 x Q product while maintaining a small footprint.
APPLIED PHYSICS LETTERS
(2023)
Article
Chemistry, Multidisciplinary
Jan N. Kirchhof, Yuefeng Yu, Gabriel Antheaume, Georgy Gordeev, Denis Yagodkin, Peter Elliott, Daniel B. de Araujo, Sangeeta Sharma, Stephanie Reich, Kirill Bolotin
Summary: We present a nanomechanical platform for rapid and sensitive measurements of the spectrally resolved optical dielectric function of 2D materials. The key feature of our approach is the integration of a suspended 2D material into a high Q silicon nitride nanomechanical resonator, which is illuminated by a wavelength-tunable laser source. By analyzing the frequency shift of the resonator and the optical reflection as a function of photon energy, we can obtain the real and imaginary parts of the dielectric function. This method, with its fast response time, high sensitivity, and broad measurement range, offers an attractive alternative to traditional spectroscopic or ellipsometric characterization techniques.
Article
Chemistry, Multidisciplinary
Paolo F. Ferrari, SunPhil Kim, Arend M. van der Zande
Summary: The study found that different types of graphene membrane resonators have different dissipation characteristics, with monolayer graphene having the highest average quality factor. Dissipation in graphene membranes is mainly affected by changes in stiffness and additional dissipation from interlayer friction. This has important implications for nanoelectromechanical systems (NEMS) based on two-dimensional heterostructures.
Article
Chemistry, Analytical
Ahmet Gulsaran, Bersu Bastug Azer, Samed Kocer, Sasan Rahmanian, Resul Saritas, Eihab M. Abdel-Rahman, Mustafa Yavuz
Summary: The proposed built-in packaging method offers a simplified and noise-free alternative for single terminal devices, demonstrated through an actuator application with comparable performance to conventional wire bonding. This compact and cost-effective packaging solution has potential for both industrial and academic applications.
Article
Chemistry, Analytical
Joon Hyong Cho, David Cayll, Dipankar Behera, Michael Cullinan
Summary: The demand for graphene-based devices is rapidly growing, but there are significant challenges in the manufacturing process. Despite recent breakthroughs in basic research, integrating graphene with Micro-Nano Electromechanical Systems remains challenging. Therefore, achieving large-scale, repeatable production is still a major barrier to the commercialization of graphene.
Article
Chemistry, Analytical
Angelo Leo, Alessandro Paolo Bramanti, Domenico Giusti, Fabio Quaglia, Giuseppe Maruccio
Summary: This article proposes a novel approach for dynamic microwave modulation using reconfigurable resonant circuits. The approach involves the integration of double split ring resonators (DSRRs) with microelectromechanical actuators (MEMS) for geometrical tuning. Numerical simulations showed a resonance frequency shift of 370 MHz through a 170 μm extrusion driven by a DC voltage. This technology offers potential applications in multiband telecommunications, wireless power transfer, and the IoT field.
Article
Engineering, Electrical & Electronic
Jun Yu, Hanna Cho
Summary: This study proposes a simple design for enhancing the performance of resonant MEMS and investigates the role of internal resonance mechanisms. The findings suggest that strong nonlinear coupling can provide a wider range of resonant dynamics and maintain frequency stability even when the modal frequencies do not match.
SENSORS AND ACTUATORS A-PHYSICAL
(2023)