Ultrananocrystalline and Nanocrystalline Diamond Thin Films for MEMS/NEMS Applications

Published 2011 View Full Article

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Title
Ultrananocrystalline and Nanocrystalline Diamond Thin Films for MEMS/NEMS Applications
Authors
Keywords
-
Journal
MRS BULLETIN
Volume 35, Issue 04, Pages 281-288
Publisher
Cambridge University Press (CUP)
Online
2011-02-02
DOI
10.1557/mrs2010.550
References
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