Journal
SCRIPTA MATERIALIA
Volume 96, Issue -, Pages 21-24Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.scriptamat.2014.10.010
Keywords
Focused ion beam (FIB); High-resolution electron microscopy (HREM); Transmission electron microscopy (TEM); Crystal structure; Tantalum
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Funding
- Department of Education
- US Department of Energy [DEAC04-94AL85000]
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Thin tantalum films have been studied during in situ heating in a transmission electron microscope. Diffraction patterns from the as-deposited films were typical of amorphous materials. Crystalline grains were observed to form when the specimen was annealed in situ at 450 degrees C. Particular attention was addressed to the formation and growth of grains with the face-centered cubic (fcc) crystal structure. These observations are discussed in relation to prior work on the formation of fcc Ta by deformation and during thin film deposition. (C) 2014 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.
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