Single-step synthesis process of Ti 3 SiC 2 ohmic contacts on 4H-SiC by sputter-deposition of Ti

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Title
Single-step synthesis process of Ti 3 SiC 2 ohmic contacts on 4H-SiC by sputter-deposition of Ti
Authors
Keywords
Silicon carbide, MAX phase, Physical vapor deposition, High temperature
Journal
SCRIPTA MATERIALIA
Volume 99, Issue -, Pages 53-56
Publisher
Elsevier BV
Online
2014-12-09
DOI
10.1016/j.scriptamat.2014.11.025

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