Atomic gold-enabled three-dimensional lithography for silicon mesostructures
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Title
Atomic gold-enabled three-dimensional lithography for silicon mesostructures
Authors
Keywords
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Journal
SCIENCE
Volume 348, Issue 6242, Pages 1451-1455
Publisher
American Association for the Advancement of Science (AAAS)
Online
2015-06-26
DOI
10.1126/science.1257278
References
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