The on-chip temperature compensation and temperature control research for the silicon micro-gyroscope

Title
The on-chip temperature compensation and temperature control research for the silicon micro-gyroscope
Authors
Keywords
Temperature Coefficient, Control Circuit, Proof Mass, Digitally Control Oscillator, Zero Bias
Publisher
Springer Nature
Online
2014-07-24
DOI
10.1007/s00542-014-2271-z

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