Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 19, Issue 5, Pages 713-720Publisher
SPRINGER
DOI: 10.1007/s00542-013-1741-z
Keywords
-
Ask authors/readers for more resources
A micro machined accelerometer based on an area variation capacitive sensing for more applications was developed, in this case, we will describe and improve in this work the efficacity as well as the sensitivity of a capacitive accelerometer based on an area of variation capacitive sensing considered as a micro system electro mechanical (MEMS) available and realizable. However, the simulation was performed using MATLAB as software used in complicated situation with an optimization of the several parameters of accelerometer and a single direction, which is consisted with mobile fingers and fixed fingers, as two springs which ensures the damping of the system. The general concept, main design considerations and performance of the resulted accelerometer was optimized and elaborated in order to obtain a good improvement.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available