Technology of ultralong deep brain fluidic microelectrodes combined with etching-before-grinding

Microfabricated Sampling Probes for in Vivo Monitoring of Neurotransmitters

(2013) Woong Hee Lee et al.   ANALYTICAL CHEMISTRY

In Vivo Measurements With Robust Silicon-Based Multielectrode Arrays With Extreme Shaft Lengths

(2013) Gergely Marton et al.   IEEE SENSORS JOURNAL

Deep-brain silicon multielectrodes for simultaneous in vivo neural recording and drug delivery

(2013) A. Pongrácz et al.   SENSORS AND ACTUATORS B-CHEMICAL

Fracture analysis of silicon microprobes designed for deep-brain stimulation

(2012) Z. Fekete et al.   MICROELECTRONIC ENGINEERING

Improved process flow for buried channel fabrication in silicon

(2012) Z. Fekete et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Ultrathin Silicon Chips of Arbitrary Shape by Etching Before Grinding

(2011) S. Herwik et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

A floating 3D silicon microprobe array for neural drug delivery compatible with electrical recording

(2011) S Spieth et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

In-plane silicon probes for simultaneous neural recording and drug delivery

(2010) K Seidl et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING