Development of near hermetic silicon/glass cavities for packaging of integrated lithium micro batteries

Published 2009 View Full Article

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Title
Development of near hermetic silicon/glass cavities for packaging of integrated lithium micro batteries
Authors
Keywords
-
Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 16, Issue 7, Pages 1119-1129
Publisher
Springer Nature
Online
2009-12-02
DOI
10.1007/s00542-009-0954-7

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