Assessment of testing methodologies for thin-film vacuum MEMS packages

Published 2008 View Full Article

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Title
Assessment of testing methodologies for thin-film vacuum MEMS packages
Authors
Keywords
-
Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 15, Issue 1, Pages 161-168
Publisher
Springer Nature
Online
2008-07-02
DOI
10.1007/s00542-008-0651-y

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