Numerical simulation and analysis of electrically actuated microbeam-based MEMS capacitive switch

Published 2008 View Full Article

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Title
Numerical simulation and analysis of electrically actuated microbeam-based MEMS capacitive switch
Authors
Keywords
-
Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 15, Issue 2, Pages 301-307
Publisher
Springer Nature
Online
2008-10-13
DOI
10.1007/s00542-008-0702-4

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