Design and fabrication of an electrochemically actuated microvalve

Published 2008 View Full Article

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Title
Design and fabrication of an electrochemically actuated microvalve
Authors
Keywords
-
Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 14, Issue 9-11, Pages 1751-1756
Publisher
Springer Nature
Online
2008-03-03
DOI
10.1007/s00542-008-0594-3

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