Polytetrafluoroethylene processing characteristics using high-energy X-ray

Polytetrafluoroethylene (PTFE) microstructures' processing characteristics using X-ray photo dcomposition and desorption are studied in the highest energy region (2 keV to > 12 keV). While the exposed surface states are seen melting and boiling from the remaining bubble structure of the irradiated surface, basic photochemistry of PTFE is also same as previous reports and high-aspect ratio structures are successfully formed. We developed new Ni stencil electroformed stencil masks and successfully fabricated first and practical example of PTFE micro fluidic parts. The characteristics of fabricated micro fluidic parts, a PTFE fluid filter for vertical fluid flow operation which works as passive valve, agreed with the calculated results. This suggests that the accuracy of patterning is adequate to apply this technique to fabricate microfluidic parts and other various microparts.