High functionality of a polymer nanocomposite material for MEMS applications

Published 2008 View Full Article

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Title
High functionality of a polymer nanocomposite material for MEMS applications
Authors
Keywords
-
Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 14, Issue 9-11, Pages 1451-1459
Publisher
Springer Nature
Online
2008-02-11
DOI
10.1007/s00542-008-0577-4

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