Article
Nanoscience & Nanotechnology
Zhipeng Wang, Lan Jiang, Xiaowei Li, Shuai Gao, Shipeng Zhou, Yang Liu, Lingling Huang, Jiangang Lu, Jiangang Yin
Summary: This paper discusses a high efficiency method for fabricating ultrathin FZPs of different scales on metal films using holographic femtosecond lasers. The study demonstrates the capability of cross-scale fabrication and presents the excellent imaging ability of the fabricated FZPs in the visible spectrum.
Article
Chemistry, Multidisciplinary
Martyna Michalska, Alessandro Rossi, Gasper Kokot, Callum M. M. Macdonald, Silvia Cipiccia, Peter R. T. Munro, Alessandro Olivo, Ioannis Papakonstantinou
Summary: This paper presents a method for fabricating high-aspect ratio nanogratings, which have important applications in X-ray imaging. By combining laser interference and nanoimprint lithography, physical vapor deposition, metal assisted chemical etching, and electroplating, the fabrication challenges are overcome. The results show that the fabricated nanogratings have aspect ratios exceeding 40, and they exhibit excellent diffractive abilities when exposed to a hard X-ray beam, suggesting potential applicability in phase-based X-ray imaging.
ADVANCED FUNCTIONAL MATERIALS
(2023)
Article
Nanoscience & Nanotechnology
Ruoxin Fan, Baozhi Wang, Yigui Li, Liyan Lai
Summary: Nano-gratings with high structural accuracy and aspect ratio were prepared using synchrotron radiation by optimizing the experimental conditions. The optimal exposure dose and development time were determined by observing surface loss and roughness. The controlled variables experimental method helped achieve the desired rectangular grating structure.
Article
Instruments & Instrumentation
F. J. Marshall, S. T. Ivancic, C. Mileham, P. M. Nilson, J. J. Ruby, C. Stoeckl, B. S. Scheiner, M. J. Schmitt
Summary: Experiments using FZP lens achieved high spatial resolution X-ray images at different energy ranges, with resolution test conducted using backlit patterns and grids. High-speed framing cameras were crucial in obtaining high-resolution FZP images.
REVIEW OF SCIENTIFIC INSTRUMENTS
(2021)
Article
Engineering, Electrical & Electronic
Bo Zhou, Bo Su, Wurui Ta, Zenghui Yang, Junhu Meng
Summary: This paper presents a simple method for fabricating high-aspect-ratio PDMS microstructures by reducing interfacial adhesion through the cooling process. The effect of cooling on the topography, elastic property, and adhesion property of PDMS is studied, showing that air-cooled PDMS has lower adhesion compared to traditional oven-cooled PDMS. Application of this method successfully yielded PDMS microchannels with a depth of 200μm and an aspect ratio of 10.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
(2021)
Article
Materials Science, Multidisciplinary
Simo Wang, Jiangyong Zhang, Peng Tian, Fan Yang, Siyang Yu, Jian Wang, Wei Yan, Fanxing Li
Summary: This paper proposes a laser superdiffraction optical needle direct writing lithography method for single-exposure fabrication of high-aspect-ratio microstructures (HARMs). The principles of 3/4 circular image focusing and lithography exposure are theoretically analyzed, and the experimental setup is built. Using this method, high fabrication efficiency, super diffraction resolution, and high-aspect ratio HARMs can be achieved.
ADVANCED MATERIALS TECHNOLOGIES
(2023)
Article
Materials Science, Multidisciplinary
Yanli Li, Weier Lu, Shanfeng Wang, Qingxi Yuan, Xiangdong Kong, Li Han, Yang Xia
Summary: In this study, atomic layer deposition (ALD) and focused ion beam (FIB) milling were used to prepare multilayer Fresnel zone plate (ML-FZP) for hard X-ray microscopy. The obtained Al2O3/HfO2 ML-FZP had a total zone thickness of 10 μm, which is much greater than the reported ML-FZPs fabricated by the same method, and is of great significance to increase the active region of FZP. The ML-FZP with an outermost zone width of 40 nm and aspect ratio of 157 achieved a 29 nm half-pitch cut-off resolution in transmission X-ray microscopy (TXM) at 9 keV.
Article
Optics
David Ceddia, Andrew M. Kingston, Daniele Pelliccia, Alexander Rack, David M. Paganin
Summary: Spatial light modulation is important for various applications, and we propose a new method called ghost projection that does not require configurable beam-shaping elements. Instead, this method displaces a single illuminated mask to create specific radiant exposure distributions. We study the effects and limitations of this method and investigate how to adapt it to spatially nonuniform illumination. These findings will help optimize experimental design and achieve practical ghost projection.
Review
Engineering, Manufacturing
Nicholas Yew Jin Tan, Xinquan Zhang, Dennis Wee Keong Neo, Rui Huang, Kui Liu, A. Senthil Kumar
Summary: This paper discusses the manufacturing process of Fresnel lenses and their importance and advantages in the industry. It categorizes the methods of manufacturing Fresnel lenses into two main groups and points out the lack of comprehensive research on the use of UPM techniques for producing these lens structures.
JOURNAL OF MANUFACTURING PROCESSES
(2021)
Article
Optics
Elena Longo, Domenico Alj, Joost Batenburg, Ombeline de la Rochefoucauld, Charlotte Herzog, Imke Greving, Ying Li, Mikhail Lyubomirskiy, Ken Vidar Falch, Patricia Estrela, Silja Flenner, Nicola Vigano, Marta Fajardo, Philippe Zeitoun
Summary: This study demonstrates the first use of a flexible plenoptic microscope operating with hard X-rays to computationally reconstruct images at different depths. The experimental results confirm the potential of quasi-3D X-ray imaging without sample rotation, with high spatial resolution.
Article
Engineering, Electrical & Electronic
Qiucheng Chen, Chengyang Mu, Xujie Tong, Jun Zhao, Qingxin Wu, Yifang Chen
Summary: Diffractive Fresnel zone plates with rectangular zones in noble metals are important components in X-ray microscope. However, the high zone height required for coherent focusing/imaging on the focal plane becomes difficult to achieve with electron beam lithography due to proximity effect. This work conducted simulations to explore the achievable zone height for 30 nm zone plates using Monte Carlo model. The results provide guidance for the development of nanofabrication process of 30 nm resolution zone plates.
MICROELECTRONIC ENGINEERING
(2023)
Article
Chemistry, Analytical
Jose Miguel Fuster, Sergio Perez-Lopez, Francisco Belmar, Pilar Candelas
Summary: In this study, the effect of predistortion techniques on the focusing profile of Fresnel Zone Plates in ultrasound applications is analyzed. The magnitude, number, and location of the predistorted rings influence the lens focusing profile differently. Predistortion in the inner area of the lens allows control of the focal depth, while predistortion in areas further from the center can tailor the acoustic intensity distribution among main and secondary foci. This technique has great potential for controlling, modifying, and shaping FZP focusing profiles in various applications.
Article
Engineering, Electrical & Electronic
Kui Zhang, Zhengwei Wang, Guodong Chen, Jinlun Zheng, Zhichang Mo, Yang Wang, Jingsong Wei
Summary: In this study, a new two-step development process was proposed to significantly improve the aspect ratio of micro/nanostructures in the AgInSbTe (AIST) heat-mode resist. This technique addresses key issues in heat-mode lithography for manufacturing functional nanostructures requiring high aspect ratios.
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
(2021)
Article
Polymer Science
Kanghyun Kim, Kyungjin Park, Hyoryung Nam, Geon Hwee Kim, Seong Kyung Hong, Suhyeon Kim, Hyeonsu Woo, Seungbin Yoon, Jong Hyun Kim, Geunbae Lim
Summary: The study presents a simple X-ray lithography method that enables control of the oblique angle of submicron-scale structures on a centimeter scale, as well as the fabrication of multiscale patterns.
Article
Instruments & Instrumentation
M. Mazuritskiy, A. M. Lerer, A. Marcelli, S. B. Dabagov, M. Coreno, A. D'Elia, S. J. Rezvani
Summary: Synchrotron radiation sources were used to study the focusing properties and angular distribution of X-ray radiation at the exit of spherically bent microchannel plates (MCPs). Soft X-ray radiation at energies up to 1.5 keV can be effectively focused by MCPs with curvature radii of 30 mm and 50 mm, with a maximum focusing efficiency of up to 23%. The theoretical model for wave propagation through MCPs successfully explained the experimental results, confirming the wave channeling phenomenon in spherically bent MCPs.
JOURNAL OF SYNCHROTRON RADIATION
(2021)
