Microscale molding replication of Cu- and Ni-based structures

Published 2008 View Full Article

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Title
Microscale molding replication of Cu- and Ni-based structures
Authors
Keywords
-
Journal
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
Volume 14, Issue 9-11, Pages 1731-1737
Publisher
Springer Nature
Online
2008-01-08
DOI
10.1007/s00542-007-0516-9

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