A new MEMS-based system for ultra-high-resolution imaging at elevated temperatures

Published 2009 View Full Article

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Title
A new MEMS-based system for ultra-high-resolution imaging at elevated temperatures
Authors
Keywords
-
Journal
MICROSCOPY RESEARCH AND TECHNIQUE
Volume 72, Issue 3, Pages 208-215
Publisher
Wiley
Online
2009-01-22
DOI
10.1002/jemt.20673
References
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