Characterization of 3D Dopant Distribution in State of the Art FinFET Structures

Published 2016 View Full Article

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Title
Characterization of 3D Dopant Distribution in State of the Art FinFET Structures
Authors
Keywords
-
Journal
MICROSCOPY AND MICROANALYSIS
Volume 19, Issue S2, Pages 960-961
Publisher
Cambridge University Press (CUP)
Online
2016-10-19
DOI
10.1017/s143192761300679x

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