Journal
MICROSCOPY AND MICROANALYSIS
Volume 18, Issue 6, Pages 1263-1269Publisher
CAMBRIDGE UNIV PRESS
DOI: 10.1017/S1431927612013499
Keywords
cathodoluminesce; photoluminescence; scanning electron microscope; confocal microscope; numerical aperture; europium; gallium nitride
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Funding
- Directorate For Geosciences
- Division Of Earth Sciences [1201942] Funding Source: National Science Foundation
- Div Of Electrical, Commun & Cyber Sys
- Directorate For Engineering [1140038] Funding Source: National Science Foundation
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We have developed a fiber-based confocal optical microscope that operates inside of a commercial scanning electron microscope (SEM) instrument (JEOL 6400; JEOL Ltd., Tokyo, Japan) enabling the excitation of a sample either by a laser or by electron beam, and hence combining the complimentary techniques of photoluminescence and cathodoluminescence. The instrument uses single-mode fibers that enter the SEM by vacuum feedthroughs. The illumination and collection fibers operate as effective pinholes providing, in combination with a microscope objective (NA = 0.3), high spatial resolution (similar to 2 mu m) and excellent collection efficiency. The high spatial resolution ensures that the light collected from the sample is in a region of optimal laser beam and electron beam overlap. The capabilities of this instrument are tested by experiments involving the excitation of europium ions in situ doped in GaN thin films.
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