Nanofabrication with a High Resolution Helium Ion Beam

Published 2010 View Full Article

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Title
Nanofabrication with a High Resolution Helium Ion Beam
Authors
Keywords
-
Journal
MICROSCOPY AND MICROANALYSIS
Volume 16, Issue S2, Pages 202-203
Publisher
Cambridge University Press (CUP)
Online
2010-08-26
DOI
10.1017/s1431927610063270

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