Diffusion of TaN and HfO into TiN in a Metal Gate Stack

Published 2008 View Full Article

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Title
Diffusion of TaN and HfO into TiN in a Metal Gate Stack
Authors
Keywords
-
Journal
MICROSCOPY AND MICROANALYSIS
Volume 14, Issue S2, Pages 1252-1253
Publisher
Cambridge University Press (CUP)
Online
2008-08-03
DOI
10.1017/s1431927608085516

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