Journal
MICRON
Volume 63, Issue -, Pages 28-34Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.micron.2014.01.008
Keywords
Off-axis electron holography; High-resolution transmission electron microscopy; Iterative reconstruction
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Funding
- DFG [SFB 787, INST 131/508-1]
- FEI company
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All micrographs are limited by shot-noise, which is intrinsic to the detection process of electrons. For beam insensitive specimen this limitation can in principle easily be circumvented by prolonged exposure times. However, in the high-resolution regime several instrumental instabilities limit the applicable exposure time. Particularly in the case of off-axis holography the holograms are highly, sensitive to the position and voltage of the electron-optical biprism. We present a novel reconstruction algorithm to average series of off-axis holograms while compensating for specimen drift, biprism drift, drift of biprism voltage, and drift of defocus, which all might cause problematic changes from exposure to exposure. We show an application of the algorithm utilizing also the possibilities of double biprism holography, which results in a high quality exit-wave reconstruction with 75 pm resolution at a very high signal-to-noise ratio. (C) 2014 Elsevier Ltd. All rights reserved.
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