Chemical 3D tomography of 28nm high K metal gate transistor: STEM XEDS experimental method and results

Published 2013 View Full Article

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Title
Chemical 3D tomography of 28nm high K metal gate transistor: STEM XEDS experimental method and results
Authors
Keywords
-
Journal
MICRON
Volume 47, Issue -, Pages 43-49
Publisher
Elsevier BV
Online
2013-01-27
DOI
10.1016/j.micron.2013.01.004

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