Local thickness measurement through scattering contrast and electron energy-loss spectroscopy

Published 2011 View Full Article

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Title
Local thickness measurement through scattering contrast and electron energy-loss spectroscopy
Authors
Keywords
-
Journal
MICRON
Volume 43, Issue 1, Pages 8-15
Publisher
Elsevier BV
Online
2011-07-23
DOI
10.1016/j.micron.2011.07.003

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