In situ micro-Raman analysis and X-ray diffraction of nickel silicide thin films on silicon

Published 2008 View Full Article

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Title
In situ micro-Raman analysis and X-ray diffraction of nickel silicide thin films on silicon
Authors
Keywords
-
Journal
MICRON
Volume 40, Issue 1, Pages 89-93
Publisher
Elsevier BV
Online
2008-04-09
DOI
10.1016/j.micron.2008.03.007

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