Fabrication of fluidic chips with 1-D nanochannels on PMMA substrates by photoresist-free UV-lithography and UV-assisted low-temperature bonding

Title
Fabrication of fluidic chips with 1-D nanochannels on PMMA substrates by photoresist-free UV-lithography and UV-assisted low-temperature bonding
Authors
Keywords
-
Journal
Microfluidics and Nanofluidics
Volume 10, Issue 6, Pages 1223-1232
Publisher
Springer Nature
Online
2010-12-28
DOI
10.1007/s10404-010-0753-6

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