Journal
MICROFLUIDICS AND NANOFLUIDICS
Volume 7, Issue 2, Pages 283-289Publisher
SPRINGER HEIDELBERG
DOI: 10.1007/s10404-009-0404-y
Keywords
Surface micromachining; Sacrificial etching; Photodefinable; SU-8; DUV
Funding
- Micron Foundation
- Brigham Young University Office of Research and Creative Activities
Ask authors/readers for more resources
Hollow tubular microfluidic channels were fabricated from two spin-on, photodefinable polymers.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available
Share Paper
