Journal
MICROELECTRONICS JOURNAL
Volume 45, Issue 8, Pages 1093-1102Publisher
ELSEVIER SCI LTD
DOI: 10.1016/j.mejo.2014.05.009
Keywords
Miniaturization; MEMS modal analysis; Phase shifter; Polymer; Switched capacitor; SU-8; Switching time
Funding
- Indian Nanoelectronics User's Program (INUP) [20(8)/2007 - NANO]
- DeitY
- MCIT
- Government of India
- IIT Bombay under INUP
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This paper aims to present in detail the design, fabrication and the various characterization techniques adopted in realizing a novel miniature-size switched capacitor based phase shifter. The work strives to provide an all-round development of a DMTL (Distributed MEMS Transmission Line) based phase shifting unit yielding an overall phase shift of 15 degrees at a frequency of 15 GHz. The RF MEMS (Radio Frequency Micro Electro Mechanical Systems) Switched Capacitor based phase shifter has highly miniaturized dimensions, and is capable of solving many limitations to which the conventional Switched Capacitors are mostly susceptible. This miniature RF MEMS switched capacitor actuates at a low actuation voltage of 12 V, exhibits a fundamental frequency of vibration as high as 1.468 MHz and a switching time of 1.4 mu s which is an improvement over the other reported designs. Various characterization results seem to validate the simulations. (C) 2014 Elsevier Ltd. All rights reserved.
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